Vacuums

Image Part Number Description / PDF Quantity Rfq
VACEXP-03

VACEXP-03

Atrix International

EXPRESS OFFICE VACUUM

19

VACOMEGASECRH

VACOMEGASECRH

Atrix International

OMEGA SUPREME CLEANROOM VACUUM

10

VACOHCS

VACOHCS

Atrix International

OMEGA HEPA CERTIFIED SYSTEM VACU

10

VACOSE110

VACOSE110

Atrix International

OMEGA SUPREME ELECTRONIC VACUUM

20

VACOMEGASCT

VACOMEGASCT

Atrix International

OMEGA SUPREME PLUS HEPA VACUUM

16

ATIHCTV5

ATIHCTV5

Atrix International

HIGH CAPACITY ELECTRONIC VACUUM

15

ATIBCV

ATIBCV

Atrix International

ANTIMICROBIAL CLASS 100 CLEANROO

5

VACOSE220

VACOSE220

Atrix International

OMEGA SUPREME ELECTRONIC VACUUM

19

VACO22VESD

VACO22VESD

Atrix International

OMEGA CORDLESS ESD VACUUM

14

Vacuums

1. Overview

Vacuum pumps are mechanical devices designed to remove gas molecules from sealed enclosures, creating a partial vacuum. They play a critical role in scientific research, industrial processes, and advanced manufacturing by enabling pressure control, contamination prevention, and material manipulation. Modern vacuum technology is essential for semiconductor fabrication, medical equipment, and space simulation systems.

2. Major Types and Functional Classification

TypeFunctional CharacteristicsApplication Examples
Rotary Vane PumpOil-lubricated, high pumping speed, low ultimate vacuumSemiconductor thin-film deposition
Screw Vacuum PumpDry compression, oil-free operation, corrosion resistanceChemical vapor deposition (CVD)
Turbo Molecular PumpHigh-speed rotor, ultra-high vacuum capabilityMass spectrometers, electron microscopes
Diaphragm PumpOil-free, low maintenance, moderate vacuum levelLaboratory sample preparation
Cryogenic PumpSuperconducting cooling, captures gas moleculesParticle accelerators, fusion reactors

3. Structure and Components

Typical vacuum pump systems consist of: - Motor-driven compression mechanism (rotary/oscillating components) - Vacuum chamber interface flanges - Gas ballast valves for moisture control - Oil filtration/recirculation systems (for wet pumps) - Electronic pressure sensors and control units - Exhaust silencers and emission filters - Vibration damping mounts

4. Key Technical Parameters

ParameterDescriptionImportance
Pumping Speed (m /h)Gas volume processed per unit timeDetermines system evacuation time
Ultimate Vacuum (mbar)Minimum achievable pressure levelCritical for process quality control
Power Consumption (kW)Operational energy requirementsImpacts operating costs
Material CompatibilityResistance to chemical/media exposureEnsures operational safety
Noise Level (dB)Acoustic emissions during operationAffects workplace environment

5. Application Fields

Primary industries include: - Semiconductor manufacturing (etching machines, deposition systems) - Medical technology (MRI scanners, radiotherapy equipment) - Scientific research (particle accelerators, vacuum ovens) - Food packaging (modified atmosphere systems) - Aerospace (space simulation chambers) - Metallurgy (vacuum furnaces for heat treatment)

6. Leading Manufacturers and Products

ManufacturerProduct SeriesKey Features
Busch Vacuum SolutionsR5 rotary vane series10-5 mbar ultimate vacuum, ISO 9001 certified
Edwards VacuumnXDS dry scroll pumpsOil-free, 10-2 mbar performance
Pfeiffer VacuumHiCube turbomolecular pumps2,880 l/s pumping speed, smart control
Atlas CopcoGHS VSD+ screw pumpsVariable speed drive, energy-efficient

7. Selection Recommendations

Key consideration factors: - Required vacuum level vs. pump's ultimate vacuum rating - Process gas composition (corrosive/reactive gases) - Throughput requirements (pumping speed vs. chamber volume) - Operating environment (temperature, humidity) - Maintenance intervals and spare parts availability - Energy efficiency class and total cost of ownership - Compatibility with existing system interfaces

8. Industry Trends

Current development directions: - Smart vacuum systems with IoT integration for predictive maintenance - Increased adoption of dry vacuum technology to reduce environmental impact - Development of hybrid pumps combining multiple vacuum principles - Nanocoating technologies for improved corrosion resistance - Miniaturization for portable analytical instrument applications - Energy recovery systems for industrial vacuum networks

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